ASTM F1438-1993(2005) 用扫描隧道显微术法测定气体分配系统元件的表面粗糙度的测试方法
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【英文标准名称】:StandardTestMethodforDeterminationofSurfaceRoughnessbyScanningTunnelingMicroscopyforGasDistributionSystemComponents
【原文标准名称】:用扫描隧道显微术法测定气体分配系统元件的表面粗糙度的测试方法
【标准号】:ASTMF1438-1993(2005)
【标准状态】:现行
【国别】:
【发布日期】:1993
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:显微术;试验;管道工程系统;气体分配;表面粗糙度
【英文主题词】:Gasdistributionsystems;Microscopicexamination-electronicmaterials;Roughness;Scanningtunnelingmicroscopy;Semiconductorcleanrooms;Stainlesssteel-gasdistributionsystems;Surfaceanalysis-electroniccomponents/devices;Texture;Topogra
【摘要】:TheuseofSTMimagesanddataisforpurposesoftexturalqualityassessmentandcalculationoffiguresofmerit,andforhighpuritygassystemcleanroomcomponents.ThistestmethoddefinesastandarddatapresentationformatandsuggestsfiguresofmeritthatutilizeSTMrsquo;abilitytoanalyzethree-dimensionalsurfacefeatures.1.1Thepurposeofthistestmethodistodefineamethodforanalyzingthesurfacetextureoftheabove-mentionedcomponentsusingascanningtunnelingmicroscope(STM).STMisanoncontactmethodofsurfaceprofilingthatcanmeasurethree-dimensionalsurfacefeaturesinthenanometersizerange,whichcanthenbeusedtorepresentthesurfacetextureortoprovidefiguresofmerit.Applicationofthistestmethod,wheresurfacetextureisusedasaselectioncriterion,isexpectedtoyieldcomparabledataamongdifferentcomponentstested.1.2Limitations:1.2.1ThistestmethodislimitedtocharacterizationofstainlesssteelsurfacesthataresmootherthanRa=0.25[mu]m,asdeterminedbyacontact-stylusprofilometeranddefinedbyANSIB46.1.Themagnificationsandheightscalesusedinthistestmethodwerechosenwiththissmoothnessinmind.1.2.2Intentionaletchingorconductivecoatingofthesurfaceareconsideredmodificationsofthegas-wettedsurfaceandarenotcoveredbythistestmethod.1.2.3Thistestmethoddoesnotcoversteelsthathaveanoxidelayertoothicktopermittunnelingunderthetestconditionsoutlinedin11.3.1.3ThistechniqueiswrittenwiththeassumptionthattheSTMoperatorunderstandstheuseoftheinstrument,itsgoverningprinciples,andanyartifactsthatcanarise.Discussionofthesepointsisbeyondthescopeofthistestmethod.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:J04
【国际标准分类号】:17_040_20
【页数】:10P.;A4
【正文语种】:
【原文标准名称】:用扫描隧道显微术法测定气体分配系统元件的表面粗糙度的测试方法
【标准号】:ASTMF1438-1993(2005)
【标准状态】:现行
【国别】:
【发布日期】:1993
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:显微术;试验;管道工程系统;气体分配;表面粗糙度
【英文主题词】:Gasdistributionsystems;Microscopicexamination-electronicmaterials;Roughness;Scanningtunnelingmicroscopy;Semiconductorcleanrooms;Stainlesssteel-gasdistributionsystems;Surfaceanalysis-electroniccomponents/devices;Texture;Topogra
【摘要】:TheuseofSTMimagesanddataisforpurposesoftexturalqualityassessmentandcalculationoffiguresofmerit,andforhighpuritygassystemcleanroomcomponents.ThistestmethoddefinesastandarddatapresentationformatandsuggestsfiguresofmeritthatutilizeSTMrsquo;abilitytoanalyzethree-dimensionalsurfacefeatures.1.1Thepurposeofthistestmethodistodefineamethodforanalyzingthesurfacetextureoftheabove-mentionedcomponentsusingascanningtunnelingmicroscope(STM).STMisanoncontactmethodofsurfaceprofilingthatcanmeasurethree-dimensionalsurfacefeaturesinthenanometersizerange,whichcanthenbeusedtorepresentthesurfacetextureortoprovidefiguresofmerit.Applicationofthistestmethod,wheresurfacetextureisusedasaselectioncriterion,isexpectedtoyieldcomparabledataamongdifferentcomponentstested.1.2Limitations:1.2.1ThistestmethodislimitedtocharacterizationofstainlesssteelsurfacesthataresmootherthanRa=0.25[mu]m,asdeterminedbyacontact-stylusprofilometeranddefinedbyANSIB46.1.Themagnificationsandheightscalesusedinthistestmethodwerechosenwiththissmoothnessinmind.1.2.2Intentionaletchingorconductivecoatingofthesurfaceareconsideredmodificationsofthegas-wettedsurfaceandarenotcoveredbythistestmethod.1.2.3Thistestmethoddoesnotcoversteelsthathaveanoxidelayertoothicktopermittunnelingunderthetestconditionsoutlinedin11.3.1.3ThistechniqueiswrittenwiththeassumptionthattheSTMoperatorunderstandstheuseoftheinstrument,itsgoverningprinciples,andanyartifactsthatcanarise.Discussionofthesepointsisbeyondthescopeofthistestmethod.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:J04
【国际标准分类号】:17_040_20
【页数】:10P.;A4
【正文语种】:
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点击此处下载